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Opt Express. 2012 Sep 10;20(19):21341-5. doi: 10.1364/OE.20.021341.

High quality factor and high confinement silicon resonators using etchless process.

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School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA.


We demonstrate high quality factor and high confinement in a silicon ring resonator fabricated by a thermal oxidation process. We fabricated a 50 μm bending radius racetrack resonator, with a 5 μm coupling region. We achieved an intrinsic quality factor of 760,000 for the fundamental TM mode, which corresponds to a propagation loss of 0.9 dB/cm. Both the fundamental TE and TM modes are highly confined in the waveguide, with effective indices of 3.0 for the TE mode and 2.9 for the TM mode.


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