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Biosens Bioelectron. 2012 Oct-Dec;38(1):369-74. doi: 10.1016/j.bios.2012.06.023. Epub 2012 Jun 21.

Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading.

Author information

1
Electrical Engineering Division, Department of Engineering, University of Cambridge, Cambridge CB3 0FA, United Kingdom. luis.garcia-gancedo@eng.cam.ac.uk

Abstract

Thin film bulk acoustic wave resonator (FBAR) devices supporting simultaneously multiple resonance modes have been designed for gravimetric sensing. The mechanism for dual-mode generation within a single device has been discussed, and theoretical calculations based on finite element analysis allowed the fabrication of FBARs whose resonance modes have opposite reactions to temperature changes; one of the modes exhibiting a positive frequency shift for a rise of temperature whilst the other mode exhibits a negative shift. Both modes exhibit negative frequency shift for a mass load and hence by monitoring simultaneously both modes it is possible to distinguish whether a change in the resonance frequency is due to a mass load or temperature variation (or a combination of both), avoiding false positive/negative responses in gravimetric sensing without the need of additional reference devices or complex electronics.

PMID:
22784500
DOI:
10.1016/j.bios.2012.06.023
[Indexed for MEDLINE]

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