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Micron. 2012 Sep;43(9):992-5. doi: 10.1016/j.micron.2012.03.012. Epub 2012 Mar 30.

Position-controlled marker formation by helium ion microscope for aligning a TEM tomographic tilt series.

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1
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology-AIST, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan. misa-hayashida@aist.go.jp

Abstract

We formed nano-dots using a helium ion microscope (HIM) equipped with a gas injection system. Because of position controllability, the nano-dot markers could be placed efficiently on a specimen using the HIM. The sizes of the dots were controlled by changing the beam radiation time. We tried for the first time to form dots on a rod-shaped specimen to use them as markers for aligning a transmission electron microscope tomographic tilt series before reconstructing 3D images.

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