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Opt Express. 2012 Apr 9;20(8):8535-42. doi: 10.1364/OE.20.008535.

A nano-opto-mechanical pressure sensor via ring resonator.

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ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 20043, China.


This paper reports a nano-opto-mechanical pressure sensor based on nano-scaled ring resonator. The pressure is measured through the output spectrum shift which is induced via mechanical deformation of the ring resonator. The sensitivity as high as 1.47 pm/kPa has been experimentally achieved which agrees with numerical prediction. Due to the strong variation of sensitivity with different ring radius and thickness of the diaphragm, the pressure sensor can be used to form an array structure to detect the pressure distribution in highly accurate measurement with low-cost advantages. The nano-opto-mechanical pressure sensor has potential applications such as shear stress displacement detection, pressure wave detector and pressure mapping etc.


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