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Adv Mater. 2012 May 22;24(20):2722-7. doi: 10.1002/adma.201104842. Epub 2012 Apr 12.

AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators.

Author information

1
Department of Mechanical Engineering, Berkeley Sensor and Actuator Center, University of California at Berkeley, 94720, USA. gimmylin@berkeley.edu

Abstract

An AlN/3C-SiC composite layer enables the third-order quasi-symmetric (QS(3)) Lamb wave mode with a high quality factor (Q) characteristic and an ultra-high phase velocity up to 32395 ms(-1). A Lamb wave resonator utilizing the QS(3) mode exhibits a low motional impedance of 91 Ω and a high Q of 5510 at a series resonance frequency (f(s)) of 2.92 GHz, resulting in the highest f(s)·Q product of 1.61 × 10(13) Hz among the suspended piezoelectric thin film resonators reported to date.

PMID:
22495881
DOI:
10.1002/adma.201104842
[Indexed for MEDLINE]

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