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Opt Express. 2012 Feb 13;20(4):3572-9. doi: 10.1364/OE.20.003572.

Selecting detection wavelength of resonant cavity-enhanced photodetectors by guided-mode resonance reflectors.

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Department of Electronics Engineering, National Chiao Tung University, 1001 University Road, Hsinchu 300, Taiwan.


We propose and demonstrate a novel device structure of resonant cavity-enhanced photodetector (RCE-PD). The new RCE-PD structure consists of a bottom distributed Bragg reflector (DBR), a cavity with InGaAs multiple quantum wells (MQWs) for light absorption and a top mirror of sub-wavelength grating. By changing the fill factor of the 2-D grating, the effective cavity length of RCE-PDs can be varied so the resonant wavelength can be selected post growth. Accordingly, we can fabricate an array of PDs on a single chip, on which every PD aims for a specific wavelength.

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