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Sensors (Basel). 2010;10(4):3835-56. doi: 10.3390/s100403835. Epub 2010 Apr 14.

Design, fabrication, and testing of a bulk micromachined inertial measurement unit.

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1
Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi'an, Shaanxi, China. changhl@nwpu.edu.cn

Abstract

A bulk micromachined inertial measurement unit (MIMU) is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a global area optimization method based on the relationship between the sensitivity and layout area was proposed to determine the layout configuration of the six sensors. The scale factors of the X/Y-axis accelerometer and Z-axis accelerometer are about 213.3 mV/g and 226.9 mV/g, respectively. The scale factors of the X/Y-axis gyroscope and Z-axis gyroscope are about 2.2 mV/°/s and 10.8 mV/°/s, respectively. The bias stability of the X/Y-axis gyroscope and the Z-axis gyroscope are about 2135 deg/h and 80 deg/h, respectively. Finally, the resolutions of X/Y-axis accelerometers, Z-axis accelerometers, X/Y-axis gyroscopes, and Z-axis gyroscopes are 0.0012 g/√Hz, 0.0011 g/√Hz, 0.314 °/s/√Hz, and 0.008 °/s/√Hz, respectively.

KEYWORDS:

MEMS; MIMU; accelerometer; bulk micromachining; gyroscope

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