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Conf Proc IEEE Eng Med Biol Soc. 2011;2011:2937-40. doi: 10.1109/IEMBS.2011.6090808.

A transparent μECoG array for simultaneous recording and optogenetic stimulation.

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Bioengineering Department, University of California, Berkeley, CA 94720, USA.


In this paper we report for the first time the design, fabrication and characterization of an optically transparent electrode array for micro-electrocorticography. We present a 49-channel μECoG array with an electrode pitch of 800 μm and a 16-channel linear μECoG array with an electrode pitch of 200 μm. The backing material was Parylene C. Transparent, sputtered indium tin oxide (ITO) was used in conjunction with e-beam evaporated gold to fabricate the electrodes. We provide electrochemical impedance characterization and light transmission data for the fabricated devices.

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