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Sensors (Basel). 2011;11(12):11112-21. doi: 10.3390/s111211112. Epub 2011 Nov 28.

A zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip.

Author information

1
Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan. d099061005@mail.nchu.edu.tw

Abstract

A zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process was investigated. The structure of the ammonia sensor is composed of a sensitive film and polysilicon electrodes. The ammonia sensor requires a post-process to etch the sacrificial layer, and to coat the sensitive film on the polysilicon electrodes. The sensitive film that is prepared by a hydrothermal method is made of zinc oxide. The sensor resistance changes when the sensitive film adsorbs or desorbs ammonia gas. The readout circuit is used to convert the sensor resistance into the voltage output. Experiments show that the ammonia sensor has a sensitivity of about 1.5 mV/ppm at room temperature.

KEYWORDS:

ammonia microsensor; nanorod; readout circuit; zinc oxide film

PMID:
22247656
PMCID:
PMC3251973
DOI:
10.3390/s111211112
[Indexed for MEDLINE]
Free PMC Article

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