Format

Send to

Choose Destination
See comment in PubMed Commons below
Sensors (Basel). 2010;10(6):6149-71. doi: 10.3390/s100606149. Epub 2010 Jun 21.

Review on the modeling of electrostatic MEMS.

Author information

1
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan. d96543004@ntu.edu.tw

Abstract

Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.

KEYWORDS:

MEMS; electromechanics; electrostatics; pull-in voltage

PMID:
22219707
PMCID:
PMC3247752
DOI:
10.3390/s100606149
[Indexed for MEDLINE]
Free PMC Article
PubMed Commons home

PubMed Commons

0 comments
How to join PubMed Commons

    Supplemental Content

    Full text links

    Icon for Multidisciplinary Digital Publishing Institute (MDPI) Icon for PubMed Central
    Loading ...
    Support Center