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Sensors (Basel). 2010;10(11):9541-63. doi: 10.3390/s101109541. Epub 2010 Oct 28.

Novel designs for application specific MEMS pressure sensors.

Author information

1
Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345E, DK-2800 Kgs Lyngby, Denmark. giulio.fragiacomo@nanotech.dtu.dk

Abstract

In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsically immune to electromagnetic interference, with large pressure range (0-350 bar) and a sensitivity of 1 pm/bar is presented. Finally, a resonating wireless pressure sensor power source free with a sensitivity of 650 KHz/mmHg is described. These sensors will be related with their applications in harsh environment, distributed systems and medical environment, respectively. For many aspects, commercially available sensors, which in vast majority are piezoresistive, are not suited for the applications proposed.

KEYWORDS:

MEMS; MOEMS; capacitive; micromachined; optical; pressure; silicon; wireless

PMID:
22163425
PMCID:
PMC3231033
DOI:
10.3390/s101109541
[Indexed for MEDLINE]
Free PMC Article

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