Format

Send to

Choose Destination
Opt Express. 2011 Aug 29;19(18):16975-84. doi: 10.1364/OE.19.016975.

Fabrication of phase-change chalcogenide Ge2Sb2Te5 patterns by laser-induced forward transfer.

Author information

1
Graduate Institute of Applied Physics, National Taiwan University, Taipei, Taiwan.

Abstract

Femtosecond laser pulses are focused on a thin film of Ge2Sb2Te5 phase-change material, and the transfer of the illuminated material to a nearby substrate is investigated. The size, shape, and phase-state of the fabricated pattern can be effectively controlled by the laser fluence and by the thickness of the Ge2Sb2Te5 film. Results show multi-level electrical and optical reflection states of the fabricated patterns, which may provide a simple and efficient foundation for patterning future phase-change devices.

PMID:
21935057

Supplemental Content

Loading ...
Support Center