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Rev Sci Instrum. 2011 Jul;82(7):076103. doi: 10.1063/1.3608111.

Note: Optical fiber milled by focused ion beam and its application for Fabry-Pérot refractive index sensor.

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Department of Photonics Engineering, Technical University of Denmark, DK-2800 Kgs. Lyngby, Denmark.


We introduce a highly compact fiber-optic Fabry-Pérot refractive index sensor integrated with a fluid channel that is fabricated directly near the tip of a 32 μm in diameter single-mode fiber taper. The focused ion beam technique is used to efficiently mill the microcavity from the fiber side and finely polish the end facets of the cavity with a high spatial resolution. It is found that a fringe visibility of over 15 dB can be achieved and that the sensor has a sensitivity of ~1731 nm/RIU (refractive index units) and a detection limit of ~5.78 × 10(-6) RIU. This miniature integrated all-in-fiber optofludic sensor may find use in minimal-invasive biomedical applications.

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