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Adv Mater. 2011 Feb 15;23(7):860-4. doi: 10.1002/adma.201003885. Epub 2011 Jan 10.

Conformable solid-index phase masks composed of high-aspect-ratio micropillar arrays and their application to 3D nanopatterning.

Author information

1
Department of Materials Science and Engineering, KAIST Institute for Nanocentury, Korea Advanced Institute of Science and Technology, Daejeon, 305 - 701, Republic of Korea.
PMID:
21328480
DOI:
10.1002/adma.201003885
[Indexed for MEDLINE]

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