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Opt Lett. 2011 Feb 1;36(3):421-3. doi: 10.1364/OL.36.000421.

Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities.

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  • 1School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA.


We present the fabrication and characterization of high-quality-factor (Q) Si3N4 photonic crystal nanobeam cavities at visible wavelengths for coupling to nitrogen-vacancy centers in a cavity QED system. Confocal microphotoluminescence analysis of the nanobeam cavities demonstrates quality factors up to Q ~ 55,000, which are limited by the resolution of our grating spectrometer. This is a 1-order-of-magnitude improvement over previous SiNx cavities at this important wavelength range. We also demonstrate coarse tuning of cavity resonances across 600-700 nm by lithographically scaling the size of fabricated devices.

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