Etched beam splitters in InP/InGaAsP

Opt Express. 2011 Jan 17;19(2):717-26. doi: 10.1364/OE.19.000717.

Abstract

An etched beam splitter (EBS) photonic coupler based on frustrated total internal reflection (FTIR) is designed, fabricated and characterized in the InP/InGaAsP material system. The EBS offers an ultra compact footprint (8x11 μm) and a complete range of bar/cross coupling ratio designs. A novel pre-etching process is developed to achieve sufficient depth of the etched coupling gaps. Fabricated EBS couplers demonstrate insertion loss between 1 and 2.6 dB with transmission (cross-coupling) ≤ 10%. The results show excellent agreement with 3D finite-difference time-domain (FDTD) modeling. The coupling of EBS has weak wavelength dependence in the C-band, making it suitable for wavelength division multiplexing (WDM) or other wide bandwidth applications. Finally, the EBS is integrated with active semiconductor optical amplifier (SOA) and phase-modulator components; using a flattened ring resonator structure, a channelizing filter tunable in both amplitude and center frequency is demonstrated, as well as an EBS coupled ring laser.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Arsenicals / chemistry*
  • Computer-Aided Design
  • Equipment Design
  • Equipment Failure Analysis
  • Gallium / chemistry*
  • Indium / chemistry*
  • Interferometry / instrumentation*
  • Lenses*
  • Phosphines / chemistry*
  • Refractometry / instrumentation*

Substances

  • Arsenicals
  • Phosphines
  • Indium
  • gallium arsenide
  • Gallium
  • indium phosphide