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Biomed Microdevices. 2011 Apr;13(2):375-81. doi: 10.1007/s10544-010-9506-2.

M³: Microscope-based maskless micropatterning with dry film photoresist.

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1
Department of Biomedical Engineering, Stony Brook University, Stony Brook, NY 11794-8181, USA.

Abstract

We present a maskless micropatterning system that utilizes a fluorescence microscope with programmable X-Y stage and dry film photoresist to realize feature sizes in the sub-millimeter range (40-700 μm). The method allows for flexible in-house maskless photolithography without a dedicated microfabrication facility and is well-suited for rapid prototyping of microfluidic channels, scaffold templates for protein/cell patterning or optically-guided cell encapsulation for biomedical applications.

PMID:
21190086
PMCID:
PMC3171148
DOI:
10.1007/s10544-010-9506-2
[Indexed for MEDLINE]
Free PMC Article
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