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Opt Express. 2010 Nov 22;18(24):25102-7. doi: 10.1364/OE.18.025102.

Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces.

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1
Opto-electronics Technology Center, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin, 130033, China.

Abstract

We demonstrate the lithographic fabrication of diffractive optical elements (DOEs) in hybrid SiO2/TiO2 sol-gel glass on 3-D curved surfaces. The concentric circular gratings with periods of 20 μm, 10 μm and 5 μm have been fabricated in sol-gel glass on concave lens by laser direct writing successfully. Continuous 3-Dimensional surface relief with a height of 435 nm, 110 nm and 50 nm has been obtained for the period of 20 μm, 10 μm and 5 μm respectively. The optical test results of the fabricated DOE shows only a little bit deviation from the theoretical calculated results which can be explained by 3-D curved surface effect. We believe this technology can be an effective method to fabricate DOEs with even more complex surface profile on 3-D curved surfaces in terms of its simplicity and cost-effectiveness.

PMID:
21164856
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