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Opt Express. 2010 Nov 8;18(23):23878-90. doi: 10.1364/OE.18.023878.

Simulating different manufactured antireflective sub-wavelength structures considering the influence of local topographic variations.

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1
Carl Zeiss Jena GmbH, Carl-Zeiss-Promenade 10, 07745 Jena, Germany. dennis.lehr@uni-jena.de

Abstract

Laterally structured antireflective sub-wavelength structures show unique properties with respect to broadband performance, damage threshold and thermal stability. Thus they are superior to classical layer based antireflective coatings for a number of applications. Dependent on the selected fabrication technology the local topography of the periodic structure may deviate from the perfect repetition of a sub-wavelength unit cell. We used rigorous coupled-wave analysis (RCWA) to simulate the efficiency losses due to scattering effects based on height and displacement variations between the individual protuberances. In these simulations we chose conical and Super-Gaussian shapes to approximate the real profile of fabricated structures. The simulation results are in accordance with the experimentally determined optical properties of sub-wavelength structures over a broad wavelength range. Especially the transmittance reduction in the deep-UV could be ascribed to these variations in the sub-wavelength structures.

PMID:
21164733
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