Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates

Opt Express. 2010 Sep 13;18(19):20086-95. doi: 10.1364/OE.18.020086.

Abstract

This paper demonstrates transfer of optical devices without extra un-patterned silicon onto low-cost, flexible plastic substrates using single-crystal silicon nanomembranes. Employing this transfer technique, stacking two layers of silicon nanomembranes with photonic crystal waveguide in the first layer and multi mode interference couplers in the second layer is shown, respectively. This technique is promising to realize high density integration of multilayer hybrid structures on flexible substrates.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Elastic Modulus
  • Equipment Design
  • Equipment Failure Analysis
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure
  • Nanotechnology / instrumentation*
  • Refractometry / instrumentation*
  • Silicon / chemistry*
  • Surface Plasmon Resonance / instrumentation*

Substances

  • Silicon