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Appl Opt. 1993 Dec 1;32(34):6914-9. doi: 10.1364/AO.32.006914.

Laser driver for soft-x-ray projection lithography.


A design of a diode-pumped Nd:YAG laser for use as the driver for a soft-x-ray projection lithography system is described. This laser will output up to 1 J per pulse with a 2- to 5-ns pulse duration and a 400-Hz pulse repetition rate. The design employs microchannel-cooled diode laser arrays, zigzag slab energy storage, a regenerative amplifier cavity that uses phase conjugator beam correction for near-diffraction-limited beam quality, and stimulated Brillouin scattering pulse compression to achieve the required pulse length.


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