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Appl Opt. 1992 Sep 10;31(26):5706-11. doi: 10.1364/AO.31.005706.

Optimized kinoform structures for highly efficient fan-out elements.


We discuss the realization of highly efficient fan-out elements. Laser-beam writing lithography is available now for fabricating smooth surface relief microstructures. We develop several methods for optimizing microstructure profiles. Only a small number of parameters in the object plane are necessary for determining the kinoform. This simplifies the calculation of M x N arrays also for large M and N. Experimental results for a 9-beam fan-out element are presented.


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