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Opt Express. 2010 May 24;18(11):11713-9. doi: 10.1364/OE.18.011713.

SiC avalanche photodiode array with microlenses.

Author information

1
Department of Electrical and Computer Engineering, University of Virginia, 351 McCormick Road, Charlottesville, Virginia 22904, USA. kl7pb@virginia.edu

Abstract

A simple technique to incorporate microlenes with small photodiode arrays is demonstrated and analyzed. Using this method, the fill factor was increased from 2.6% to 22.4% for a two by two array. Simulation results are also shown. The photocurrent with microlens was approximately 8.6 times larger than without the microlens, which is consistent with simulation results.

PMID:
20589031
[Indexed for MEDLINE]
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