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Opt Express. 2010 Jun 21;18(13):13444-50. doi: 10.1364/OE.18.013444.

Polarization insensitive resonance-domain blazed binary gratings.

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  • 1Department of Physics and Mathematics, University of Eastern Finland, Joensuu, Finland.


Three variants of binary blazed gratings with subwavelength features are considered, which have high first-order efficiencies in the non-paraxial domain for arbitrarily polarized light. A combination of effective medium theory and further parametric optimization with the Fourier modal method are used in design. Experimental demonstration is provided by electron beam lithography on a structure etched in a Si3N4 layer on top of a SiO2 substrate, with period approximately 3.5lambda at lambda = 633 nm. The measured efficiency (81% for TE and 85% for TM polarization) agrees well with the calculated value, 84%.

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