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Opt Express. 2010 Jun 7;18(12):12127-35. doi: 10.1364/OE.18.012127.

Silicon-on-sapphire integrated waveguides for the mid-infrared.

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Department of Electrical Engineering, University of Washington, Campus Box 352500, Seattle WA 98195-2500 USA.


Silicon waveguides are now widely used to guide radiation in the near-infrared, mainly in the wavelength range of 1.1 - 2.2 microm. While low-loss waveguides at longer wavelengths in silicon have been proposed, experimental realization has been elusive. Here we show that single-mode integrated silicon-on-sapphire waveguides can be used at mid-infrared wavelengths. We demonstrate waveguiding at 4.5 microm, or 2222.2 cm(-1), with losses of 4.3 +/- 0.6 dB/cm. This result represents the first practical integrated waveguide system for the mid-infrared in silicon, and enables a range of new applications.


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