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Adv Mater. 2010 Aug 3;22(29):3171-5. doi: 10.1002/adma.200904153.

Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography.

Author information

1
Sandia National Laboratories, Albuquerque, NM 87185, USA. dbburck@sandia.gov
PMID:
20533414
DOI:
10.1002/adma.200904153
[Indexed for MEDLINE]

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