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Opt Lett. 2010 May 15;35(10):1602-4. doi: 10.1364/OL.35.001602.

High-throughput three-dimensional lithographic microfabrication.

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Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue,Cambridge, Massachusetts 02139, USA.


A 3D lithographic microfabrication process has been developed that is high throughput, scalable, and capable of producing arbitrary patterns. It offers the possibility for industrial scale manufacturing of 3D microdevices such as photonic crystals, tissue engineering scaffolds, and microfluidics chips. This method is based on depth-resolved wide-field illumination by temporally focusing femtosecond light pulses. We characterized the axial resolution of this technique, and the result is consistent with the theoretical prediction. As proof-of-concept experiments, we demonstrated photobleaching of 3D resolved patterns in a fluorescent medium and fabricating 3D microstructures with SU-8 photoresist.

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