(a) Cross-section of measured mirror shape (black circles) compared to the theory given by (blue line) for d = 5 µm with n1 = 1.512, n2 = 1.333, NA = 1.2. (b) Difference between measurement and theory from (a). (c) Measurement of wavefront error (blue circles, left axis) as a function of the shape applied to the DM. The corresponding Strehl ratio calculated using the Marechal equation is given by the red line on the right axis. The shape is given by with n1 = 1.512, n2 = 1.333, NA = 1.285 and depth given by the x-axis. 45 singular values were used in the singular value decomposition for these measurements.