Send to

Choose Destination
Opt Express. 2009 Nov 23;17(24):22102-7. doi: 10.1364/OE.17.022102.

Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light.

Author information

Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA.


Magnesium/silicon carbide (Mg/SiC) multilayers have been fabricated with normal incidence reflectivity in the vicinity of 40% to 50% for wavelengths in the 25 to 50 nm wavelength range. However many applications, for example solar telescopes and ultrafast studies using high harmonic generation sources, desire larger bandwidths than provided by high reflectivity Mg/SiC multilayers. We investigate introducing a third material, Scandium, to create a tri-material Mg/Sc/SiC multilayer allowing an increase the bandwidth while maintaining high reflectivity.


Supplemental Content

Full text links

Icon for Optical Society of America
Loading ...
Support Center