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Opt Express. 2009 Nov 9;17(23):20762-70. doi: 10.1364/OE.17.020762.

NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators.

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Department of Physics, Università di Trento, Via Sommarive 14, I-38123 Povo (Trento), Italy.


Si-based horizontal slot waveguides coupled to ring resonators have been fabricated and characterised. The central layer of the slot has been filled by Silicon nanocrystals (Si-nc) obtained by deposition of silicon rich silicon oxide and then thermal annealing. A comparison of various deposition and annealing parameters to form the Si-nc is performed. Propagation losses as low as 3 dB/cm and ring resonator quality factor of 30,000 have been achieved at 1550 nm.

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