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Chem Rev. 2010 Jan;110(1):111-31. doi: 10.1021/cr900056b.

Atomic layer deposition: an overview.

Author information

1
Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309, USA. Steven.George@Colorado.Edu
PMID:
19947596
DOI:
10.1021/cr900056b

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