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Opt Lett. 1990 May 15;15(10):579-81.

Correlation microscope.


We have constructed a correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter, and we have developed a method to extract the amplitude and phase information of the reflected signal from a sample located at the microscope object plane. An imaging theory for the interference microscope has been derived, which predicts accurately both the transverse response at a sharp edge and the range response to a perfect plane reflector.


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