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Opt Express. 2009 Jul 6;17(14):11366-70.

High confinement micron-scale silicon nitride high Q ring resonator.

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1
School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA. aag42@cornell.edu

Abstract

We demonstrate high confinement, low-loss silicon nitride ring resonators with intrinsic quality factor (Q) of 3*10(6) operating in the telecommunication C-band. We measure the scattering and absorption losses to be below 0.065dB/cm and 0.055dB/cm, respectively.

PMID:
19582051
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