Send to

Choose Destination
See comment in PubMed Commons below
Appl Opt. 2009 Jul 1;48(19):3760-5.

Masking technique for coating thickness control on large and strongly curved aspherical optics.

Author information

  • 1Laboratoire des Matériaux Avancés, 7 Avenue Pierre de Coubertin 69100 Villeurbanne, France.


We discuss a method to control the coating thickness deposited onto large and strongly curved optics by ion beam sputtering. The technique uses an original design of the mask used to screen part of the sputtered materials. A first multielement mask is calculated from the measured two-dimensional coating thickness distribution. Then, by means of an iterative process, the final mask is designed. By using such a technique, it has been possible to deposit layers of tantalum pentoxide having a high thickness gradient onto a curved substrate 500 mm in diameter. Residual errors in the coating thickness profile are below 0.7%.

PubMed Commons home

PubMed Commons

How to join PubMed Commons

    Supplemental Content

    Full text links

    Icon for Optical Society of America
    Loading ...
    Support Center