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Opt Express. 2006 Oct 30;14(22):10228-32.

Polymeric waveguide Bragg grating filter using soft lithography.

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1
Türk Telekom Bilkent Laboratory, Department of Physics, Bilkent University, 06800 Ankara, Turkey.

Abstract

We use the soft lithography technique to fabricate a polymeric waveguide Bragg grating filter. Master grating structure is patterned by e-beam lithography. Using an elastomeric stamp and capillary action, uniform grating structures with very thin residual layers are transferred to the UV curable polymer without the use of an imprint machine. The waveguide layer based on BCB optical polymer is fabricated by conventional optical lithography. This approach provides processing simplicity to fabricate Bragg grating filters.

PMID:
19529418
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