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Opt Express. 2006 Oct 16;14(21):9636-42.

Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser.


We report sub-400 nm spatial resolution with Gabor holography obtained using a highly coherent table top 46.9 nm laser. The hologram was recorded in high resolution photoresist and subsequently digitized with an atomic force microscope. The final image was numerically reconstructed with a Fresnel propagator. Optimal reconstruction parameters and quantification of spatial resolution were obtained with a wavelet analysis and image correlation.

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