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Opt Express. 2003 Dec 1;11(24):3202-9.

Volume holographic imaging for surface metrology at long working distances.

Abstract

We present an imaging scheme that takes advantage of the superior lateral resolution of volume holographic imaging (VHI)[1] and a-priori surface information about the object to build a profilometer that can resolve 50 microm longitudinal features at a working distance of inverted exclamation markO 50 cm with a single VHI camera. We discuss the scheme and present experimental results of surface profiles of MEMS devices.

PMID:
19471446
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