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Opt Express. 2000 Jul 17;7(2):56-67.

Industrial applications of laser micromachining.

Abstract

The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Microvia, ink jet printer nozzle and biomedical catheter hole drilling, thin-film scribing and micro-electro-mechanical system (MEMS) fabrication applications are reviewed.

PMID:
19404370
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