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Opt Express. 2009 Apr 27;17(9):7233-44.

Multiplexed broadband beam steering system utilizing high speed MEMS mirrors.

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Fitzpatrick Institute for Photonics, Electrical and Computer Engineering Department, Duke University, Durham, NC 27708, USA.


We present a beam steering system based on micro-electromechanical systems technology that features high speed steering of multiple laser beams over a broad wavelength range. By utilizing high speed micromirrors with a broadband metallic coating, our system has the flexibility to simultaneously incorporate a wide range of wavelengths and multiple beams. We demonstrate reconfiguration of two independent beams at different wavelengths (780 and 635 nm) across a common 5x5 array with 4 micros settling time. Full simulation of the optical system provides insights on the scalability of the system. Such a system can provide a versatile tool for applications where fast laser multiplexing is necessary.

[Indexed for MEDLINE]

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