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Opt Express. 2008 Sep 29;16(20):16209-14.

Ion implanted optical channel waveguides in Er3+/MgO co-doped near stoichiometric LiNbO3: a new candidate for active integrated photonic devices operating at 1.5 microm.

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  • 1School of Physics, Shandong University, Jinan, 250100, China.


We report on the fabrication of active optical channel waveguides in Er(3+)/MgO co-doped near stoichiometric lithium niobate crystals by means of selective low-dose oxygen ion implantation through a specially designed photoresist stripe mask. After post-implantation treatment at 260 degrees C for 1 h, the channel waveguides possess a propagation loss of approximately 1.7 dB/cm. The micro-luminescence investigation reveals that fluorescence emissions at approximately 1.5 microm in the waveguides are well preserved with respect to the bulk, exhibiting possible applications for integrated active photonic devices.

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