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Rev Sci Instrum. 2008 Jul;79(7):073701. doi: 10.1063/1.2952058.

Improving the electrical performance of a conductive atomic force microscope with a logarithmic current-to-voltage converter.

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1
Dept. Enginyeria Electronica, Universitat Autonoma de Barcelona, 08193 Bellaterra, Spain. lidia.aguilera@uab.cat

Abstract

A new configuration of conductive atomic force microscope (CAFM) is presented, which is based in a standard CAFM where the typical I-V converter has been replaced by a log I-V amplifier. This substitution extends the current dynamic range from 1-100 pA to 1 pA-1 mA. With the broadening of the current dynamic range, the CAFM can access new applications, such as the reliability evaluation of metal-oxide-semiconductor gate dielectrics. As an example, the setup has been tested by analyzing breakdown spots induced in SiO2 layers.

PMID:
18681702
DOI:
10.1063/1.2952058
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