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Phys Rev Lett. 2008 May 23;100(20):206101. Epub 2008 May 23.

Quantitative atomic resolution scanning transmission electron microscopy.

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1
Materials Department, University of California, Santa Barbara, California 93106-5050, USA. lebeau@mrl.ucsb.edu

Abstract

Complete understanding of atomic resolution high-angle annular dark-field (Z-contrast) images requires quantitative agreement between simulations and experiments. We show that intensity variations can be placed on an absolute scale by normalizing the measured image intensities to the incident beam. We construct fractional intensity images of a SrTiO3 single crystal for regions of different thickness up to 120 nm. Experimental images are compared directly with image simulations. Provided that spatial incoherence is taken into account in the simulations, almost perfect agreement is found between simulation and experiment.

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