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J Microsc. 2008 Mar;229(Pt 3):396-401. doi: 10.1111/j.1365-2818.2008.01918.x.

Plasmonic devices with controllable resonances--an avenue towards high-speed and mass fabrication of optical meta-materials.

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  • 1Center for Applied Near-Field Optics Research, National Institute of Advanced Industrial Science and Technology, Tsukuba Central 4, 1-1-1 Higashi, Tsukuba 305-8562, Japan.


We report on the fabrication of plasmonic devices with adjustable resonances in the visible portion employing a thermal lithography method. The genuine approach enables the fabrication of nanostructured pattern at a spatial resolution comparable to other nanofabrication techniques, but at significantly larger speeds and over extended spatial domains. The fabricated structures consisted in periodically arranged nanoholes in a silver thin film and supported localized plasmon resonance (LPR) in the vicinity of 370 nm. Results from measured spectral properties were in good agreement with simulations based on rigorous diffraction theory. The method was evaluated towards a potential application to realize large-scale meta-materials with effective negative refractive index in the visible.

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