Format

Send to

Choose Destination
Appl Opt. 1999 Jul 1;38(19):4065-73.

Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope.

Author information

1
Graduate School of Science and Engineering, Saitama University, 225 Shimo-Okubo, Urawa, Saitama 338-8570, Japan. tenchan@optsun.riken.go.jp

Abstract

An improved system for the separate measurement of the refractive index and the geometrical thickness that constitutes a hybrid configuration of a confocal microscope and a wavelength-scanning heterodyne interferometer with a laser diode is presented. The optical path difference can be measured in less than 1 s, which is 10 times quicker than with the low-coherence interferometry previously used, and with a resolution of 10 microm with a fixed reference mirror. Separate measurement of the refractive index and the geometrical thickness of glass plates was demonstrated by use of the arrangement in place of the low-coherence interferometer used previously.

PMID:
18323884

Supplemental Content

Loading ...
Support Center