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Opt Lett. 1998 Oct 15;23(20):1627-9.

Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating.


We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ~40 deg . The device is made from a multilayer (SiO(2) /Si(3)N(4)) surface-relief zeroth-order one-dimensional grating with a period of 0.3 mum . The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.

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