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Microsc Microanal. 2007 Dec;13(6):428-36.

Review of atom probe FIB-based specimen preparation methods.

Author information

1
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6136, USA. millermk@ornl.gov

Abstract

Several FIB-based methods that have been developed to fabricate needle-shaped atom probe specimens from a variety of specimen geometries, and site-specific regions are reviewed. These methods have enabled electronic device structures to be characterized. The atom probe may be used to quantify the level and range of gallium implantation and has demonstrated that the use of low accelerating voltages during the final stages of milling can dramatically reduce the extent of gallium implantation.

PMID:
18001509
DOI:
10.1017/S1431927607070845

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