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Biosens Bioelectron. 2007 Sep 30;23(2):183-90. Epub 2007 Apr 8.

Integrated electrodes on a silicon based ion channel measurement platform.

Author information

1
Arizona State University, Center for Solid State Electronics Research, Tempe, AZ 85287, USA. seth.wilk@asu.edu

Abstract

We demonstrate the microfabrication of a low-noise silicon based device with integrated silver/silver chloride electrodes used for the measurement of single ion channel proteins. An aperture of 150 microm diameter was etched in a silicon substrate using a deep silicon reactive ion etcher and passivated with 30 nm of polytetrafluoroethylene via chemical vapor deposition. The average recorded noise in measurements of lipid bilayers was reduced by a factor of four through patterning of a 75 microm thick SU-8 layer around the aperture. Integrated electrodes were fabricated on both sides of the device and used for repeatable, stable, giga-seal bilayer formations as well as characteristic measurements of the transmembrane protein OmpF porin.

PMID:
17507211
DOI:
10.1016/j.bios.2007.03.030
[Indexed for MEDLINE]

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