Format

Send to

Choose Destination
Appl Opt. 2007 Apr 20;46(12):2180-8.

Analysis of multimask fabrication errors for diffractive optical elements.

Author information

1
School of Engineering and Physical Sciences, Heriot-Watt University, Edinburgh, UK. ajc4@hw.ac.uk

Abstract

As design algorithms for diffractive optical elements improve, the limiting factor becomes the fabrication process. It is hoped a better understanding of fabrication errors will allow elements with greater tolerance to be designed. This is important for high-power laser fiber coupling, where hot spots lead to failure. We model seven different fan-out gratings applying misetch, misalignment, and feature rounding. Our main findings are that misetch can lead to improved results, misalignment is strongly asymmetric, and both the pi and pi/2 masks can dominate misalignment. Rounding has a r(2) dependence and potentially can be incorporated into the design stage. Finally we present some experimental data for misalignment.

PMID:
17415385

Supplemental Content

Full text links

Icon for Optical Society of America
Loading ...
Support Center