GaBi alloy liquid metal ion source for microelectronics research

Ultramicroscopy. 2007 Sep;107(9):865-8. doi: 10.1016/j.ultramic.2007.02.022. Epub 2007 Mar 7.

Abstract

A GaBi alloy liquid metal ion source has been studied. From an analysis of the source mass spectra as a function of emission current, a mechanism is suggested for the production of single- and double-charged ions. There is good agreement with the results of Swanson's investigations of a pure Bi source.

Publication types

  • Research Support, Non-U.S. Gov't