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Opt Lett. 2006 Jan 15;31(2):208-10.

Femtosecond laser microprocessing with three-dimensionally isotropic spatial resolution using crossed-beam irradiation.

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1
RIKEN, The Institute of Physical and Chemical Research, Wako, Saitama, Japan. ksugioka@riken.jp

Abstract

We describe the use of a crossed-beam irradiation system in three-dimensional femtosecond laser microprocessing to obtain three-dimensionally isotropic spatial resolution. In the crossed-beam geometry, two orthogonal objective lenses are arranged to share a common focal point. The synthesized focal spot produces an isotropic illumination volume. We demonstrate that microfluidic channels with substantially circular cross-sectional shapes can be directly fabricated inside glass by using the crossed-beam irradiation system.

PMID:
16441032
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